Optical component packaging structure

ABSTRACT

The instant disclosure provides an optical component packaging structure which includes a far-infrared sensor chip, a first metal layer, a packaging housing and a covering member. The far-infrared sensor chip includes a semiconductor substrate and a semiconductor stack structure. The semiconductor substrate has a first surface, a second surface which is opposite to the first surface, and a cavity. The semiconductor stack structure is disposed on the first surface of the semiconductor substrate, and a part of the semiconductor stack structure is located above the cavity. The first metal layer is disposed on the second surface of the semiconductor substrate, the packaging housing is used to encapsulate the far-infrared sensor chip and expose at least a part of the far-infrared sensor chip, and the covering member is disposed above the semiconductor stack structure.

CROSS REFERENCE TO RELATED APPLICATION

This application is a continuation application of U.S. application Ser.No. 16/537,284 filed on Aug. 9, 2019, and entitled “OPTICAL COMPONENTPACKAGING STRUCTURE”, which is a continuation application of U.S.application Ser. No. 15/979,708, filed on May 15, 2018, and entitled“OPTICAL COMPONENT PACKAGING STRUCTURE”, which is a divisionalapplication of and claims the priority benefit of a prior applicationSer. No. 15/607,393, filed on May 26, 2017, now U.S. Pat. No.10,002,975, which claims the priority benefits of Taiwan applicationserial no. 105135520, filed on Nov. 2, 2016. The entirety of each of theabove patent applications is hereby incorporated by reference herein andmade a part of this specification.

BACKGROUND OF THE INVENTION 1. Field of the Invention

The instant disclosure relates to an optical component packagingstructure; in particular, to a thinned optical component packagingstructure acting as an infrared shielding and maintaining a constanttemperature.

2. Description of Related Art

Nowadays, since lightweighting has become a requirement for themulti-functional digital products on the market, various electroniccomponents with different functions such as sensor chips might be placedcollectively into the same space of a product. For example, amulti-functional smart watch may include sensor chips for sensing heartrate, blood pressure, and body temperature, as well as a light source.Hence, the requirements for thinning these electronic components areincreased. However, many such electronic components are placed togetherin a small space, which easily generates noise interferences. Inaddition, external temperature changes may also affect the stability ofthese electronic components, which decreases the service life andmeasurement accuracy of the product. Therefore, overcoming the noiseinterference problem and reducing the influence of temperature, while atthe same time satisfying the thinning requirement, are important issuesin the art.

SUMMARY OF THE INVENTION

An optical component packaging structure is provided in the instantdisclosure. By balancing the temperature in the optical componentpackaging structure, the stability of electronic components can beincreased. Furthermore, the optical component packaging structurepossesses a superior Signal-to-Noise Ratio (SNR) so that the measurementaccuracy of sensor chips is increased. At the same time, the packagingstructure of the present disclosure has a smaller size than that of theconventional packaging structure. Therefore, the abovementioned problemscan be solved. The embodiments adopted by this instant disclosure aredescribed as follows.

To achieve the abovementioned technical problems, one of the embodimentsof this instant disclosure provides an optical component packagingstructure which includes a far-infrared sensor chip, a first metallayer, a packaging housing and a covering member (eg. a metal coveringmember). The far-infrared sensor chip includes a semiconductor substrateand a semiconductor stack structure. The semiconductor substrate has afirst surface, a second surface which is opposite to the first surface,and a cavity. The semiconductor stack structure is disposed on the firstsurface of the semiconductor substrate, with the covering member beingdisposed above the semiconductor stack structure, and a part of thesemiconductor stack structure is located above the cavity. The firstmetal layer is disposed on the second surface of the semiconductorsubstrate, the packaging housing is used to encapsulate the far-infraredsensor chip, and exposes at least a part of the far-infrared sensorchip.

Another embodiment of the instant disclosure provides an opticalcomponent packaging structure which includes a substrate, a far-infraredsensor chip and a covering member. The far-infrared sensor chip isdisposed on the substrate and electrically connected to the substrate.The covering member is disposed on the substrate and accommodates thefar-infrared sensor chip, and the covering member has an outer surfaceand an inner surface which face the far-infrared sensor chip, and theinner surface and the substrate include an angle which is substantiallyin a range of 30° to 80°.

Yet another embodiment of this instant disclosure provides an opticalcomponent packaging structure which includes a substrate, a far-infraredsensor chip, a supporting structure, and a metal plate. The far-infraredsensor chip is disposed on the substrate and electrically connected tothe substrate. The supporting structure is disposed on the substrate andsurrounds the far-infrared sensor chip. The metal plate is disposed onthe supporting structure and accommodates the far-infrared sensor chip,and has a metal plate opening exposing the far-infrared sensor chip.

Yet another embodiment of this instant disclosure provides an opticalcomponent packaging structure which includes a substrate, aphotosensitive member and a light source chip. The substrate has a firstconcave part and a second concave part. The photosensitive member isdisposed in the first concave part and exposed therefrom, and iselectrically connected to the substrate. The light source chip isdisposed in the second concave part and exposed therefrom, and iselectrically connected to the substrate.

The instant disclosure has the benefits that, the stability ofelectronic components can be increased by balancing the temperature inthe optical component packaging structure, such that the opticalcomponent packaging structure of the instant disclosure can perform asuperior SNR to further increase the measurement accuracy of sensorchips. In addition, since the optical component packaging structure ofthe instant disclosure has a packaging structure with a smaller sizethan that of the conventional packaging structure, it can satisfy thethinning requirement of packaging size and reduce production costs.

In order to further appreciate the characteristics and technicalcontents of the present invention, references are hereunder made to thedetailed descriptions and appended drawings in connection with theinstant disclosure. However, the appended drawings are merely shown forexemplary purposes, rather than being used to restrict the scope of theinstant disclosure.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a schematic diagram of an optical component packagingstructure of a first embodiment in the instant disclosure;

FIG. 2 shows a schematic diagram of an optical component packagingstructure of a second embodiment in the instant disclosure;

FIG. 3 shows a schematic diagram of an optical component packagingstructure of a third embodiment in the instant disclosure;

FIG. 4 shows a schematic diagram of an optical component packagingstructure of a fourth embodiment in the instant disclosure;

FIG. 5 shows a schematic diagram of an optical component packagingstructure of a fifth embodiment in the instant disclosure;

FIG. 6 shows a schematic diagram of an optical component packagingstructure of a sixth embodiment in the instant disclosure;

FIG. 7 shows a schematic diagram of an optical component packagingstructure of a seventh embodiment in the instant disclosure;

FIG. 8 shows a schematic diagram of an optical component packagingstructure of an eighth embodiment in the instant disclosure;

FIG. 9 shows a schematic diagram of an optical component packagingstructure of a ninth embodiment in the instant disclosure;

FIG. 10 shows a schematic diagram of an optical component packagingstructure of a tenth embodiment in the instant disclosure;

FIG. 11 shows a schematic diagram of an optical component packagingstructure of an eleventh embodiment in the instant disclosure;

FIG. 12 shows a schematic diagram of an optical component packagingstructure of a twelfth embodiment in the instant disclosure;

FIG. 13 shows a schematic diagram of an optical component packagingstructure of a thirteenth embodiment in the instant disclosure;

FIG. 14 shows a schematic diagram of an optical component packagingstructure of a fourteenth embodiment in the instant disclosure;

FIG. 15 shows a schematic diagram of an optical component packagingstructure of a fifteenth embodiment in the instant disclosure;

FIG. 16A shows a side view of an optical component packaging structureof a sixteenth embodiment in the instant disclosure;

FIG. 16B shows a top view of an optical component packaging structure ofa sixteenth embodiment in the instant disclosure;

FIG. 16C shows a schematic diagram of an optical component packagingstructure of the sixteenth embodiment in a used state;

FIG. 17A shows a side view of an optical component packaging structureof a seventeenth embodiment in the instant disclosure;

FIG. 17B shows a top view of an optical component packaging structure ofthe seventeenth embodiment in the instant disclosure;

FIG. 18A shows a side view of an optical component packaging structureof an eighteenth embodiment in the instant disclosure; and

FIG. 18B shows a top view of an optical component packaging structure ofan eighteenth embodiment in the instant disclosure.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Embodiments of an optical component packaging structure disclosed in theinstant disclosure are illustrated via specific examples as follows, andpeople familiar in the art may easily understand the advantages andefficacies of the instant disclosure by disclosure of the specification.The instant disclosure may be implemented or applied by other differentspecific examples, and each of the details in the specification may beapplied based on different views and may be modified and changed underthe spirit of the instant disclosure. The figures in the instantdisclosure are not depicted according to actual size and do not reflectthe actual size of the relevant structure. The following embodimentsfurther illustrate related technologies of the instant disclosure indetail, but the scope of the instant disclosure is not limited herein.

In this specification, the terminology such as first, second, or thirdis used for describing various elements or information, but the elementsor information should not be restricted by these terminologies. Theseterminologies are used for distinguishing between an element and anotherelement, or a piece of information and another piece of information. Inaddition, the terminology used in this specification can include any oneof or a plurality of combinations of related items depending upon thesituations.

First Embodiment

Referring to FIG. 1, a schematic diagram of an optical componentpackaging structure of a first embodiment in the instant disclosure isshown. As illustrated, the first embodiment of the instant disclosureprovides an optical component packaging structure 10 which includes afar-infrared sensor chip 10, a packaging housing 120, a first metallayer 130, and a covering member 140. The far-infrared sensor chip 110includes a semiconductor substrate 112 and a semiconductor stackstructure 114. The semiconductor substrate 112 has a first surface S1, asecond surface S2 which is opposite to the first surface S1, and acavity 112 a. In this embodiment, a silicon substrate is used as anexample of the semiconductor substrate 112 for illustration, but inother embodiments, the semiconductor substrate 112 may also adopt othersuitable substrates to match the semiconductor stack structure 114.Besides, the semiconductor stack structure 114 is disposed on the firstsurface Si of the semiconductor substrate 112, and a part of thesemiconductor stack structure 114 is located above the cavity 112 a, asshown in FIG. 1.

In detail, the semiconductor stack structure 114 can be stacked up by aP-type semiconductor material, an N-type semiconductor material, and aninsulating material. In which, the insulating material is sandwichedbetween the P-type semiconductor material and the N-type semiconductormaterial. The semiconductor stack structure 114 has a hot junction 110 aand a cold junction 110 b, and the hot junction 110 a of thefar-infrared sensor chip 110 is located above the cavity 112 a where theP-type semiconductor material and the N-type semiconductor materialcontacted each other. Relatively, the cold junction 110 b of thefar-infrared sensor chip 110 is distant to the hot junction 110 a, thelatter of which is closer to a center C of the cavity 112 a.

Further referring to FIG. 1, the first metal layer 130 is disposed onthe second surface S2 of the semiconductor substrate 112, the packaginghousing 120 is used to encapsulate the far-infrared sensor chip 110 andexposes at least a part of the far-infrared sensor chip 110, and thecovering member 140 is disposed above the semiconductor stack structure114. Specifically, the first metal layer 130 of the optical componentpackaging structure 10 has a thickness which is in a range of 0.1 μm(micrometer) to 30 μm. In this embodiment, the first metal layer 130 isused to stop other stray lights from entering into the far-infraredsensor chip 110, so as to upgrade the sensitivity of the far-infraredsensor chip 110. In more detail, since a far infrared light and a nearinfrared light both have the ability to pass through certain materials,after the first metal layer 130 with the thickness ranging from 0.1 μmto 30 μm is disposed on the second surface S2 of the semiconductorsubstrate 112, a Signal-to-Noise Ratio (SNR) of the far-infrared sensorchip 110 can be significantly improved.

In addition, the cavity 112 a of the semiconductor substrate 112 of theoptical component packaging structure 10 has a height (not labeled)which is in a range of 10 μm to 1000 μm, and the cavity 112 a can befilled of air or be in a vacuum state, as shown in FIG. 1. In thisembodiment, the cavity 112 a is mainly used to block the heat of the hotjunction 110 a to prevent the heat from dissipating to the outside tooquickly. Otherwise, detected thermal voltage signals will be affected.In other words, the cavity 112 a of this embodiment is mainly used toprevent too much of the heat of the semiconductor stack structure 114from dissipating to the outside.

Furthermore, the covering member 140 may be made of a silicon materialto block other visible lights or infrared lights from entering into theoptical component packaging structure 10 from the front side thereof.That is the covering member 140 of this embodiment is mainly used toallow the far-infrared light to pass therethrough, and to filter awayother lights so as to upgrade the sensitivity of the far-infrared sensorchip 110.

In summary, this embodiment uses a metal having high thermalconductivity properties and uses the first metal layer 130 with anoptimal thickness to shield against other stray lights. For example, thenear infrared light and the far infrared light (that is, the infraredlights other than the measured object) pass through the opticalcomponent packaging structure 10. Furthermore, this embodimentcooperatively uses the cavity 112 a which is designed to have a heightranging from 10 μm to 1000 μm, so that the heat generated among elementsin the structure can avoid being influenced by each other. Thus, anoptimal shielding effect for blocking the infrared lights (especiallythe far infrared light having a wavelength ranging from 15 μm to 1000μm) and an optimal thermal conductive effect are achieved. Moreover,because the optical component packaging structure 10 of this embodimentof the instant disclosure has a superior thermal conductive effect, thetemperature of the optical component packaging structure 10 can beimmediately modulated to reach a constant temperature, so as to maintainthe stability of the product. In addition, since the first metal layer130 of this embodiment of the instant disclosure has a very thinthickness, which is in a range of 0.1 μm to 30 μm, a lightweightingeffect can be achieved.

Second Embodiment

FIG. 2 shows a schematic diagram of an optical component packagingstructure of a second embodiment in the instant disclosure. Referring toFIG. 2, an optical component packaging structure 10 a of the secondembodiment in the instant disclosure is similar to the optical componentpackaging structure 10 of the first embodiment in the instantdisclosure, except that the optical component packaging structure 10 aof the second embodiment includes a packaging housing 120 which has aplurality of metal leads 131, 132 located therein, and a part of theplurality of metal leads 131, 132 electrically connected to thefar-infrared sensor chip 110 (e.g., solder ball).

Via the arrangement of the plurality of metal leads 131, 132 of thesecond embodiment, the shielding efficacy of infrared light can beimproved, and the temperature conduction velocity can be increased toreach a constant temperature in the optical component packagingstructure 10 a quicker.

Third Embodiment

FIG. 3 shows a schematic diagram of an optical component packagingstructure of a third embodiment in the instant disclosure. Referring toFIG. 3, an optical component packaging structure 10 b of the thirdembodiment in the instant disclosure is similar to the optical componentpackaging structure 10 of the first embodiment in the instantdisclosure, except that the optical component packaging structure 10 bof the third embodiment includes a covering member 140 which has a lighttransmission substrate (eg. the light transmission member) 142 and asecond metal layer 144, the second metal layer 144 being disposed on thelight transmission substrate 142 and having a first opening portion 144a exposing the light transmission substrate 142, and the second metallayer 144 being located between the light transmission substrate 142 andthe semiconductor stack structure 114.

In this embodiment, the light transmission substrate 142 may be made ofa material such as glass or plastic, or may be other substrates havingbetter light transmittance. The second metal layer 144 has a thicknesswhich is in a range of 0.1 μm to 30 μm. The covering member 140 furtherincludes an anti-reflective coating (AR Coating) (not shown). Sincelight passes through material such as glass, which attenuates thepenetrating power of light, the transmission rate after the light passesthrough the material is less than 100%. Therefore, the AR Coating may bedisposed for increasing the light transmission rate.

Via the optical component packaging structure 10 b of this embodiment,the shielding efficacy of infrared light can be improved, and thetemperature conduction velocity can be increased to reach a constanttemperature in the optical component packaging structure 10 b quicker.

Fourth Embodiment

FIG. 4 shows a schematic diagram of an optical component packagingstructure of a fourth embodiment in the instant disclosure. Referring toFIG. 4, an optical component packaging structure 10 c of the fourthembodiment in the instant disclosure is similar to the optical componentpackaging structure 10 b of the third embodiment in the instantdisclosure, except that the optical component packaging structure 10 cof the fourth embodiment includes the covering member 140 which furtherhas a third metal layer 146 disposed on the light transmission substrate142 and has a second opening portion 146 a exposing the lighttransmission substrate 142, the light transmission substrate 142 beinglocated between the second metal layer 144 and the third metal layer146, and the first opening portion 144 a and the second opening portion146 a being opposite to each other.

In this embodiment, the third metal layer 146 has a thickness which isin a range of 0.1 μm to 30 μm. Via the optical component packagingstructure 10 c of this embodiment, the shielding efficacy of infraredlight can be improved, and the temperature conduction velocity can beincreased to reach a constant temperature in the optical componentpackaging structure 10 b quicker.

Fifth Embodiment

FIG. 5 shows a schematic diagram of an optical component packagingstructure of a fifth embodiment in the instant disclosure. Referring toFIG. 5, an optical component packaging structure 10 d of the fifthembodiment in the instant disclosure is similar to the optical componentpackaging structure 10 of the first embodiment in the instantdisclosure, except that the optical component packaging structure 10 dof the fifth embodiment includes the covering member 140 which furtherhas an indented portion 140 a, a notch of the indented portion 140 afacing toward the far-infrared sensor chip 110. In such manner, adistance is generated between the covering member 140 and thefar-infrared sensor chip 110. Since the thermal conductivity of air isinferior, using this feature, the air in a space generate by thedistance can stop any excess heat (e.g., the heat generated amongcomponents) from conducting to the far-infrared sensor chip 110, so asto avoid influencing the measurement result of the far-infrared sensorchip 110.

Sixth Embodiment

FIG. 6 shows a schematic diagram of an optical component packagingstructure of a sixth embodiment in the instant disclosure. Referring toFIG. 6, an optical component packaging structure 10 e of the sixthembodiment in the instant disclosure is similar to the optical componentpackaging structure 10 d of the fifth embodiment in the instantdisclosure, except that the optical component packaging structure 10 eof the sixth embodiment includes the covering member 140 which furtherhas a solder ball B being disposed thereon and being opposite to theindented portion 140 a for electrically connecting to other requiredcomponents.

Seventh Embodiment

FIG. 7 shows a schematic diagram of an optical component packagingstructure of a seventh embodiment in the instant disclosure. Referringto FIG. 7, the seventh embodiment of the instant disclosure provides anoptical component packaging structure 10 f which includes a substrate100, a far-infrared sensor chip 110 and a covering member 140. Thefar-infrared sensor chip 110 is disposed on the substrate 100 andelectrically connected to (e.g., a conducting wire W) the substrate 110.The covering member 140 is disposed on the substrate 100 andaccommodates the far-infrared sensor chip 110, and the covering member140 has an outer surface 1401 and an inner surface 1402 which faces thefar-infrared sensor chip 110. The inner surface 1402 and the substrate100 include an angle a which is substantially in a range of 30° to 80°.

Specifically, in this embodiment, the far-infrared sensor chip 110 ofthe optical component packaging structure 10 f is selected from a groupconsisting of thermopile, pyroelectric element and thermosensitiveelement such as bolometer. The covering member 140 has an opening 1400 aexposing the far-infrared sensor chip 110, and further includes a lighttransmission substrate (eg. the light transmission member) 142 disposedat the opening 1400 a. In addition, the covering member 140 is made of asilicon material to block other visible lights or infrared lightsentering into the optical component packaging structure 10 f from thefront side thereof. That is, the covering member 140 of this embodimentis mainly used to allow the far-infrared light to pass therethrough, andto filter other lights to increase the sensitivity of the far-infraredsensor chip 110. The light transmission substrate 142 may be made of atranslucent material such as glass or plastic, or may be othersubstrates which have a better light transmittance. The covering member140 is made of a light-tight material which is selected from a groupconsisting of plastic material and silicon material, so as to blockvisible lights.

The inner surface 1402 and the substrate 100 include an angle a rangingfrom 30° to 80° therebetween, and via this design of this embodiment,molecules can be deposited more intensively during sputtering in themanufacturing process. Therefore, the sputtering operation can beconducted more conveniently, so that the problems of uneven sputteringof vertical covers and operational inconvenience in the prior art can beovercome. It should be noted that, the sputtering is used only as anillustrative example in this embodiment, but the present disclosure isnot limited thereto.

In this embodiment, the angle a preferably ranges from 45° to 75°, andmore preferably ranges from 55° to 70°, and particularly preferablyranges from 60° to 65°.

Eighth Embodiment

FIG. 8 shows a schematic diagram of an optical component packagingstructure of an eighth embodiment in the instant disclosure. Referringto FIG. 8, an optical component packaging structure 10 g of the eighthembodiment in the instant disclosure is similar to the optical componentpackaging structure 10 f of the seventh embodiment in the instantdisclosure, except that the optical component packaging structure 10 gof the eighth embodiment includes a covering member 140 which furtherhas a metal layer portion 140 b and a covering cap 140 c. The coveringcap 140 c is light-tight, is selected from a group consisting of plasticmaterial and silicon material, and has a first outer surface 140 c ₁ anda first inner surface 140 c ₂ opposite to the first outer surface 140 c₁. The first inner surface 140 c ₂ faces the far-infrared sensor chip110.

Specifically, the metal layer portion 140 b of the covering member 140has a thickness which is in a range of 0.1 μm to 30 μm, and is disposedon the first outer surface 140 c ₁ of the covering cap 140 c. In thisembodiment, the covering cap 140 c made of a light-tight material can beused to block visible lights. The metal layer portion 140 b has athickness ranging from 0.1 μm to 30 μm and is disposed on the firstouter surface 140 c ₁ of the covering cap 140 c, so that the outsidevisible light and the infrared light passing from lateral sides, whichinfluence the far-infrared sensor chip 110, can be stopped. In thismanner, the far-infrared sensor chip 110 can accurately receive theinfrared light (especially the infrared light having a wavelengthranging from 15 μm to 1000 μm) being emitted from the subject located atthe front side of the far-infrared sensor chip 110, so as to improve theSNR and the overall performance of the optical component packagingstructure 10 g. Furthermore, since the metal layer portion 140 b has thethickness ranging from 0.1 μm to 30 μm, it can effectively prevent anyunnecessary infrared lights from passing into the optical componentpackaging structure 10 g of this embodiment, so that both the shieldingefficacy of blocking the infrared lights and the thermal conductiveeffect can be optimized. Thus, the temperature in the optical componentpackaging structure 10 g can be immediately adjusted to be constant tomaintain the stability of the product. Moreover, because the metal layerportion 140 b of this embodiment has a very thin thickness ranging from0.1 μm to 30 μm, a lightweighting effect can be achieved.

Ninth Embodiment

FIG. 9 shows a schematic diagram of an optical component packagingstructure of a ninth embodiment in the instant disclosure. Referring toFIG. 9, an optical component packaging structure 10 h of the ninthembodiment in the instant disclosure is similar to the optical componentpackaging structure 10 g of the eighth embodiment in the instantdisclosure, except that in this embodiment, the metal layer portion 140b of the covering member 140 is disposed on the first inner surface 140c ₂ of the covering cap 140 c.

In the ninth embodiment, the design of disposing the metal layer portion140 b on the first inner surface 140 c ₂ of the covering cap 140 c hasan effect identical to that of the eighth embodiment, and thus will notbe reiterated herein.

Tenth Embodiment

FIG. 10 shows a schematic diagram of an optical component packagingstructure of a tenth embodiment in the instant disclosure. Referring toFIG. 10, an optical component packaging structure 10 i of the tenthembodiment in the instant disclosure is similar to the optical componentpackaging structure 10 g of the eighth embodiment in the instantdisclosure, except that in this embodiment, the metal layer portion 140b of the covering member 140 is disposed in the covering cap 140 c.

In the tenth embodiment, the design of disposing the metal layer portion140 b in the covering cap 140 c has an effect identical to that of theeighth embodiment, and thus will not be reiterated herein.

Eleventh Embodiment

FIG. 11 shows a schematic diagram of an optical component packagingstructure of an eleventh embodiment in the instant disclosure. Referringto FIG. 11, an optical component packaging structure 10 j of theeleventh embodiment in the instant disclosure is similar to the opticalcomponent packaging structure 10 g of the eighth embodiment in theinstant disclosure, except that in this embodiment, the metal layerportion 140 b of the covering member 140 is cladded on the covering cap140 c.

In the eleventh embodiment, the design of the metal layer portion 140 bof the covering member 140 cladding the covering cap 140 c can improvethe shielding efficacy of infrared light and increase the temperatureconduction velocity, so that a constant temperature in the opticalcomponent packaging structure 10 j can be more quickly reached.

Twelfth Embodiment

FIG. 12 shows a schematic diagram of an optical component packagingstructure of a twelfth embodiment in the instant disclosure. Referringto FIG. 12, an optical component packaging structure 10 k of the twelfthembodiment in the instant disclosure is similar to the optical componentpackaging structure 10 g of the eighth embodiment in the instantdisclosure, except that in this embodiment, the covering member (eg. Themetal covering member) 140 is made of a metal material. In such manner,the shielding efficacy of infrared light and the temperature conductionvelocity can be increased, so that a constant temperature in the opticalcomponent packaging structure 10 k can be more quickly reached.

Thirteenth Embodiment

FIG. 13 shows a schematic diagram of an optical component packagingstructure of a thirteenth embodiment in the instant disclosure.Referring to FIG. 13, the thirteenth embodiment provides an opticalcomponent packaging structure 101 which includes a substrate 100, afar-infrared sensor chip 110, a supporting structure 150, and a metalplate 160. The far-infrared sensor chip 110 is disposed on the substrate100 and electrically connected to the substrate 100 (e.g., conductingwire W). The supporting structure 150 is disposed on the substrate 100and surrounds the far-infrared sensor chip 110. The metal plate 160 isdisposed on the supporting structure 150, accommodates the far-infraredsensor chip 110, and has a metal plate opening 160 a exposing thefar-infrared sensor chip 110.

Specifically, the far-infrared sensor chip 110 has a slit 110 c with aview range. The metal plate 160 has a thickness which is in a range of0.01 μm to 0.5 μm. The supporting structure 150 is light-tight and isselected from a group consisting of plastic material and siliconmaterial. In addition, in this embodiment, the optical componentpackaging structure 101 further includes a light transmission substrate142 which may be made of a translucent material such as glass orplastic, or may be other substrates which have a better lighttransmittance.

By virtue of the following designs in this embodiment, the metal plate160 of the optical component packaging structure 101 is disposed on thesupporting structure 150 to accommodate the far-infrared sensor chip110, and has a thickness ranging from 0.01 μm to 0.5 μm that can stopthe outside visible light and the infrared light passing from lateralsides from influencing the far-infrared sensor chip 110. Thefar-infrared sensor chip 110 can accurately receive the infrared lightemitted from the subject located at the front side of the far-infraredsensor chip 110, so as to improve the SNR and the overall performance ofthe optical component packaging structure 101. Furthermore, since themetal plate 160 of this embodiment directly replaces the cover of theprior art, it is unnecessary for a metal shielding structure to bedisposed on a periphery of a packaging structure, so that themanufacturing cost can be deceased and a lightweighting effect can beachieved.

Fourteenth Embodiment

FIG. 14 shows a schematic diagram of an optical component packagingstructure of a fourteenth embodiment in the instant disclosure.Referring to FIG. 14, an optical component packaging structure 10 m ofthe fourteenth embodiment in the instant disclosure is similar to theoptical component packaging structure 101 of the thirteenth embodimentin the instant disclosure, except that the optical component packagingstructure 10 m of the fourteenth embodiment has the metal layer portion140 b with a thickness in a range of 0.01 μm to 10 μm, and is disposedat an outer side of the supporting structure 150.

In this embodiment, via the design of disposing the metal layer portion140 b with the thickness ranging from 0.01 μm to 10 μm at the outer sideof the supporting structure 150, besides the abovementioned effects inthe thirteenth embodiment, it can also effectively block unnecessaryinfrared lights passing into the optical component packaging structure10 m of this embodiment, and both the shielding efficacy of blocking theinfrared lights and the thermal conductive effect can be optimized.Thus, the temperature in the optical component packaging structure 10 mcan be immediately adjusted to be constant to maintain the stability ofthe product.

Fifteenth Embodiment

FIG. 15 shows a schematic diagram of an optical component packagingstructure of a fifteenth embodiment in the instant disclosure. Referringto FIG. 15, an optical component packaging structure 10 n of thefifteenth embodiment in the instant disclosure is similar to the opticalcomponent packaging structure 10 m of the fourteenth embodiment in theinstant disclosure, except that in this embodiment, the metal layerportion 140 b of the supporting structure 150 is disposed at an innerside of the supporting structure 150, and the inner side is opposite tothe outer side and faces the far-infrared sensor chip 110.

In the fifteenth embodiment, the design of disposing the metal layerportion 140 b at the inner side of the supporting structure 150 has aneffect identical to that of the fourteenth embodiment, and thus is notreiterated herein.

Sixteenth Embodiment

Referring to FIG. 16A to FIG. 16C, FIG. 16A shows a side view of anoptical component packaging structure of a sixteenth embodiment in theinstant disclosure, FIG. 16B shows a top view of an optical componentpackaging structure of the sixteenth embodiment in the instantdisclosure, and FIG. 16C shows a schematic diagram of an opticalcomponent packaging structure of the sixteenth embodiment in a usedstate.

As illustrated, the sixteenth embodiment of this instant disclosureprovides an optical component packaging structure 10 o which includes asubstrate 100, a photosensitive member 170 and a light source chip 180.The substrate 100 has a first concave part 102 and a second concave part104. The photosensitive member 170 is disposed in the first concave part102 and is exposed therefrom, and is electrically connected to thesubstrate 100. The light source chip 180 is disposed in the secondconcave part 104 and exposed therefrom, and is electrically connected tothe substrate 100.

Specifically, the substrate 100 is made of a light-tight material suchas a plastic material or a silicon material which is used to blockvisible lights, and a thickness of the substrate 100 is 0.3 mm or less.The photosensitive member 170 and the light source chip 180 respectivelyhave a thickness which is in a range of 50 μm to 80 μm, and a totalthickness of the optical component packaging structure 10 o is 0.3 mm orless. The light source chip 180 is selected from a group consisting oflaser diode and light emitting diode. The light source chip 180 in FIG.16C is shown as being a laser diode.

In the packaging structure of prior arts, because a photosensitivemember is disposed on a substrate, and a light source is usuallyelectrically connected to the photosensitive member disposed on thesubstrate in a plugging manner, the overall size and thickness of theproduct cannot be reduced and thinned.

In this embodiment, the photosensitive member 170 and the light sourcechip 180 are respectively disposed in the first concave part 102 and thesecond concave part 104 to integrate the light source chip 180 in anidentical optical component packaging structure 10 o. That is, thesubstrate 100 is used to directly wrap rear and lateral sides of thephotosensitive member 170 and the light source chip 180 and expose frontsides of the photosensitive member 170 and the light source chip 180. Insuch manner, the thickness of the optical component packaging structure10 o can be the same as the thickness of the substrate 100. Since thephotosensitive member 170 and the light source chip 180 are respectivelydisposed in the first concave part 102 and the second concave part 104,the overall thickness of the optical component packaging structure 10 ois not influenced and maintains within 0.3 mm or less, such thatthinning is achieved and the problems present in the prior art areovercome.

Seventeenth Embodiment

Referring to FIG. 17A and FIG. 17B, FIG. 17A shows a side view of anoptical component packaging structure of a seventeenth embodiment in theinstant disclosure, and FIG. 17B shows a top view of an opticalcomponent packaging structure of the seventeenth embodiment in theinstant disclosure. An optical component packaging structure 10 p of theseventeenth embodiment in the instant disclosure is similar to theoptical component packaging structure 10 o of the sixteenth embodimentin the instant disclosure, except that the optical component packagingstructure 10 p of the seventeenth embodiment further includes a lighttransmission structure 182 which is made of a translucent material suchas glass or plastic, or may be other substrates having a better lighttransmittance, so as to clad the light source chip 180.

Eighteenth Embodiment

Referring to FIG. 18A and FIG. 18B, FIG. 18A shows a side view of anoptical component packaging structure of an eighteenth embodiment in theinstant disclosure, and FIG. 18B shows a top view of an opticalcomponent packaging structure of an eighteenth embodiment in the instantdisclosure. An optical component packaging structure 10 q of theeighteenth embodiment in the instant disclosure is similar to theoptical component packaging structure 10 p of the seventeenth embodimentin the instant disclosure, except that the optical component packagingstructure 10 q of the eighteenth embodiment further includes a lightreflective structure 184 which clads the light transmission structure182 and is disposed in the second concave part 104. Specifically, thelight reflective structure 184 is made of a metal material such asaluminum, silver, gold and copper.

The optical component packaging structure 10 q of the eighteenthembodiment has the abovementioned effects of the seventeenth embodiment,and in addition, since the light reflective structure 184 made of ametal material has a mirror effect in the eighteenth embodiment, whenthe light reflective structure 184 further clads the light transmissionstructure 182 which is already cladded with the light source chip 180,the light source of the light source chip 180 can emit light moreefficiently.

Benefits of Embodiments

In summary, the instant disclosure has the benefits that, the stabilityof electronic components can be increased by balancing the temperaturein the optical component packaging structure, such that the opticalcomponent packaging structure of the instant disclosure can perform asuperior SNR to further increase the measurement accuracy of sensorchips. In addition, since the optical component packaging structure ofthe instant disclosure has a packaging structure with a smaller sizethan previous products, it can achieve the thinning requirement ofpackaging size, thus reducing production costs.

The descriptions illustrated supra set forth simply the preferredembodiments of the present invention; however, the characteristics ofthe present invention are by no means restricted thereto. All changes,alterations, or modifications conveniently considered by those skilledin the art are deemed to be encompassed within the scope of the presentinvention delineated by the following claims.

What is claimed is:
 1. An optical component packaging structure,comprising: a substrate; a far-infrared sensor chip disposed on thesubstrate and electrically connected to the substrate; a metal coveringmember disposed on the substrate and accommodating the far-infraredsensor chip, the metal covering member has an opening exposing thefar-infrared sensor chip; and a light transmission member disposed outof the opening and on the inner surface for covering the opening tofilter the far-infrared light passing through.
 2. The optical componentpackaging structure as claimed in claim 1, wherein the far-infraredsensor chip is selected from a group consisting of thermopile,pyroelectric element and thermosensitive element.
 3. The opticalcomponent packaging structure as claimed in claim 1, wherein the metalcovering member has an opening exposing the far-infrared sensor chip. 4.The optical component packaging structure as claimed in claim 3, whereinthe metal covering member further includes a light transmission memberdisposed at the opening.